Wafer Marking System
Small footprint.
Specifications
Wafer size |
4, 5, 6, 8 inch, and 12 inch* |
| Marking | Soft / hard marking |
| Marking positioning accuracy | +/- 200µm (Option: +/- 75µm) |
| Takt time | 150WPH (5x9 dots, 12 letters) |
*For 12 inch (Two cassettes FOUP)
