WL-CSP Marking System
LD-pumped fiber-coupling SHG laser marker with air cooling.
Specifications
| Model | MS-WL-6891 (for 6 to 8 inch), MS-WL-8291 (for 8 to 12 inch) |
| Dimensions and weight | 2200W x 1763D x 1800H mm / 1600kg |
| Wafer size | 12 inch: FOUP x1 8 inch: Full automation (Open cassette) x1 6 inch: Semi automation (Manually set to a table) |
| Thickness | 0.3 to 2mm |
| Marking check | Automation (Black/white) |
| Marking positioning accuracy | Within +/- 50µm |
| Marking | White / black marking |
